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Compact Vacuum Ejector
Series ZQ
Body width10 Weight109 (Single unit with vacuum pressure switch and suction filter)
mm,
g
ZX ZR ZM
21.6mm
10mm
ZH ZU ZL
Conventional
ZX
ZQ
ZY ZQ ZF ZP ZCU AMJ Misc.
One-touch fitting
Digital vacuum pressure switch
With LED display
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Series Variations
Series Nozzle diameter Release Supply valve mm valve o0.5 o0.7 o1.0 * N.C. * N.O. * Latching Vacuum pressure switch * 1 NPN output and analog output * 1 PNP output and analog output * 2 NPN outputs * 2 PNP outputs Suction filter Filtration 30 m
ZQ105 ZQ107 ZQ110
* N.C.
13-9-1
Compact Vacuum Ejector
Series ZQ
How to Order
Ejector unit
ZQ1 07 1U
K1
5L
D31 C
Check valve
Nil K
None With check valve
Nozzle nominal size
05 07 10
o0.5 o0.7 o1.0
Ejector exhaust
1U 3M
Silencer for single unit Silencer for manifold
Note) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum port side when a manifold is used.
Solenoid valve combination (Refer to Table (1).)
Supply valve Symbol N.C. K1 N.O. K2 N.C. J1 N.O. J2 Latching positive common Q1 Latching positive common Q2 Release valve N.C. N.C. None None N.C. None
Warning
q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, the work piece may not be released.)
Vacuum switch electrical entry
C CL CN
Connector type Lead wire length: 0.6 m Connector type Lead wire length: 3 m Connector type Without connector
Pilot valve (Refer to Table (1).)
Nil Y
Standard type (1 W for DC) Note) DC low wattage type (0.5 W)
Note) In the case of the manifold type or when single unit valves are aligned closely with each other, avoid energization lasting more than 3 days.
Voltage (Refer to Table (1).)
1 2 3 4 5 6
100 V AC 200 V AC 110 V AC 220 V AC 24 V DC 12 V DC
Vacuum pressure switch suction filter
F D31 D32 D51
Suction filter only 1 NPN output and analog output, suction filter 2 NPN outputs, suction filter 1 PNP output and analog output, suction filter 2 PNP outputs, suction filter
Electrical entry
L LO G
L plug connector, With 0.3 m lead wire With light/surge voltage suppressor L plug connector, Without connector With light/surge voltage suppressor Grommet, With 0.3 m lead wire (Not available for latching and AC types.)
D52
Manual override
Nil B
Non-locking push type Latching: Push-lock type Locking slotted type
Only the "Nil" type manual override is available with a latching type supply valve. In such cases, the supply valve and release valve come with a lock.
Table (1) Combination of solenoid valve, pilot valve and power supply voltage
Solenoid valve www..com q w e r t y u i combination symbol K1 K1 K2 J1 J1 J2 Q1 Q2 Pilot valve symbol Nil Y Nil Nil Y Nil Nil Nil AC 100 Applicable power supply voltage AC 200 AC 110 AC 220 DC 24 DC 12
Combinations (1) to (8) in the above table are the only possible options.
13-9-2
Compact Vacuum Ejector
Series
ZQ
How to Order
Manifold
ZZQ1 08
BSB
Pilot exhaust port location
B Both sides
Number of stations Note)
01 02 08 ... 1 station 2 station 8 station ...
ZX
Exhaust
S Silencer (Both sides)
Note) Number of stations varies according to nozzle nominal size during simultaneous operation.
ZR ZM
Maximum number of stations in simultaneous operation
Nozzle nominal size Maximum number of stations in simultaneous operation 8 Stations o0.5 6 Stations o0.7 4 Stations o1.0
Supply port location
B Both sides
ZH ZU
Manifold Ordering Example
ZZQ108-BSB ZQ1053M-K1Y5L-D31C ZQ1103M-K1Y5L-D31C 1 pc. 4 pcs. (Stations 1 to 4) 4 pcs. (Stations 5 to 8)
Flow Characteristics/Exhaust Characteristics
ZQ105 Exhaust Characteristics
Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -60 -40 -20 Maximum suction flow 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 20 15 Air consumption 10 5 Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR))
ZL ZY ZQ ZF ZP ZCU AMJ Misc.
ZQ105 Flow Characteristics
Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) -80 -60 -40 -20
The stations are sequentially numbered. When viewed from the side of the vacuum ports, the far left station is designated as station 1.
Left
Right
H
H
H
H
H
H
H
MODE SET1 SET2
MODE SET1 SET2
MODE SET1 SET2
MODE SET1 SET2
MODE SET1 SET2
MODE SET1 SET2
MODE SET1 SET2
H
S 1 RN U
MODE SET1 SET2
HL
HL
HL
HL
HL
HL
HL
L
L
L
L
L
L
L
RN U
RN U
RN U
RN U
RN U
RN U
S 1
S 1
S 1
S 1
S 1
S 1
S 1
RN U
L
HL
0 2 4 6 8 10 Suction flow (l/min(ANR))
S 2
S 2
S 2
S 2
S 2
S 2
S 2
S 2
ZQ107 Exhaust Characteristics
Maximum vacuum pressure -80 -60 20 -40 -20 Maximum suction flow 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) Air consumption 10 30 Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa)
a kP a kP a kP a kP a kP a kP a kP a kP
ZQ107 Flow Characteristics
-80 -60 -40 -20
Vacuum port
1
2
3
4
5
6
7
8
ZQ1053M-K1Y5L-D31C ZQ1103M-K1Y5L-D31C
0 5 10 15 Suction flow (l/min(ANR))
ZQ110 Exhaust Characteristics
Maximum vacuum pressure -80 -60 -40 Air consumption -20 Maximum suction flow 0 0.1 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 60 50 40 30 20 10 Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa)
ZQ110 Flow Characteristics
-80 -60 -40 -20
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0 5 10 15 20 25 Suction flow (l/min(ANR))
13-9-3
Series
ZQ
Weight
Model ZQ105 0.5 5 14 ZQ107 0.7 10 23 -80 kPa 0.3 MPa to 0.6 MPa 0.35 MPa 0.43 MPa 5 to 50C ZQ110 1.0 22 46 Switch and suction filter Note 2) End plate assembly for manifold Single unit Suction filter Note 1) 95 g 109 g 122 g
Specifications
Ejector
Nozzle nominal diameter mm o Maximum suction flow l/min(ANR) Air consumption l/min(ANR) Maximum vacuum pressure Supply pressure range Supply pressure Operating temperature range
Note 1) Including a 0.3 m connector for the supply and release valves. Note 2) Including a 0.3 m connector for the supply and release valves and a 0.6 m connector for the switch.
Calculation of weight for the manifold type (Single unit weight) x (Number of stations) + (Weight of end plate assembly for manifold) Example) Switch + 8 stations with suction filter 109 g x 8 + 122 g = 994 g
Supply Valve and Release Valve
Type
Order Model (Refer to How to13-9-5.)for solenoid valves on page
Normally closed type Standard type Low wattage type (0.5 W) VQ110- VQ110Y-
Latching type VQ110L-
Normally open type ZQ1-VQ120-
Fluid Maximum operating pressure Minimum operating pressure Ambient and fluid temperature Lubrication Manual override Rated coil voltage DC Power consumption (current value) 100 VAC 110 VAC 200 VAC 220 VAC Electrical entry
Air, Inert gas 0.6 MPa 0.3 MPa 5 to 50C Not required Non-locking push type / Lock type (tool type) Push-lock type 12, 24 VDC, 100, 110, 200, 220 VAC 1W 0.5 VA (5 mA) 0.55 VA (5 mA) 1.0 VA (5 mA) 1.1 VA (5 mA) Grommet L plug connector (With light/surge voltage suppressor) 0.5 W -- -- -- -- 0.6 VA (6 mA) 0.65 VA (5.9 mA) 1.2 VA (6 mA) 1.3 VA (5.9 mA) L plug connector With light/surge voltage suppressor Non-locking push type / Lock type (tool type) 12, 24 VDC 1W -- -- -- -- Grommet L plug connector
With (voltagelight/surge ) suppressor
Vacuum Pressure Switch
Refer to for (pressure How to Orderpagevacuum ) switches on 13-9-5.
Model
ZQ1S-D31 -
-AS
ZQ1S-D51 -
-AS
ZQ1S-D32 -
-AS
ZQ1S-D52 - -AS
Rated pressure range Set pressure range Withstand pressure Fluid Power supply voltage Current consumption Ambient temperature range Ambient humidity range Withstand voltage Insulation resistance Switch output Maximum load current Maximum applied voltage Residual voltage Response time www..com Hysteresis Display Display accuracy Output indicator light Analog output Note) Output voltage Linearity 0 to 15% F.S. or less (adjustable)
0 to -100 kPa 0 to -99 kPa 0.2 MPa Air/Non-corrosive metal/Non-combustible gas 12 to 24 VDC 10% 35 mA or less [with power supply voltage of 24 VDC and switch output ON (with no load)] 5 to 50 C (with no freezing or condensation) 35 to 85 %RH in operation and saving (with no condensation) 500 VAC for 1 min 50 M or more (between live parts and pressure port at 500 VDC) 1 NPN output and analog output 1 PNP output and analog output 2 NPN outputs 80 mA (per output) 30 V (for NPN output) NPN output: 0.8 V or less (at 80 mA inrush), PNP output: 1.2 V or less (at 80 mA discharge) 2 ms or less 2% F.S. or less (fixed) 0 to 15% F.S. or less (adjustable) 2-digit red LED 3 %F.S. 2 digits Lights up when output is ON (red LED). Lights up when output is ON (red for OUT1 and green for OUT2) (Only applicable to D31 and D5.1) 1 to 5 V 2.5% F.S. or less 0.5 F.S. or less 2% F.S. or less (fixed) 2 PNP outputs
13-9-4
Compact Vacuum Ejector Construction
Single unit Manifold
Series
ZQ
t e w q
r y u i
o
ZX ZR ZM ZH ZU ZL
Component Parts
No. q w e r Nozzle Diffuser Release flow adjustment needle Description Poppet valve assembly Material - Aluminum Aluminum Aluminum
Replacement Parts
No. t y u i o Description Solenoid valve Filter element Sound absorbing material 1 (single unit) Vacuum pressure switch Sound absorbing material 2 (manifold) Material - PVF PVF - PVF Part no. Refer to How to Order below XT534-5-001-AS XT534-5-004 Refer to "How to Order" below XT534-5-003
ZY ZQ ZF ZP ZCU
How to Order
Pilot valve
Nil Y L
Standard type (1W) DC low wattage type (0.5 W) Not available for AC type Latching positive common
AMJ Misc.
Rated coil voltage
1 2 3 4 5 6
100V AC 200V AC 110V AC 220V AC 24V DC 12V DC
Check valve
Nil K
None With check valve
Actuation
1
Normally closed
Note) The check valve has a function to prevent the exhaust air from the silencer overflowing to the vacuum port side when a manifold is used.
Warning
q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, the workpiece may not be released.)
Solenoid valve
VQ1 1 0 ZQ1 VQ1 2 0
Actuation
2
Normally open
5L 5L
Vacuum pressure switch
ZQ1S D 31 C
AS
Switch specifications
31 1 NPN output and analog output 2 NPN outputs 32 51 1 PNP output and analog output 2 PNP outputs 52
Electrical entry
Connector type Lead wire length: 0.6 m Connector type CL Lead wire length: 3 m
C
Pilot valve
Nil
Standard type (1W)
Rated coil voltage 5 24V DC www..com
6
12V DC
CN Without connector
Electrical entry
L plug connector With 0.3 m lead wire L plug connector LO Without connector Grommet With 0.3 m lead wire G (Not available for latching and AC types.)
Manual override
Nil B
Non-locking push type Latching: Push-lock type Locking: Slotted type
Note) Mounting screws are attached.
L
Note) Only the "Nil" type is available with a latching type.
Note) Mounting screws are attached.
13-9-5
Series
ZQ
Dimensions
Type K1 1U-K1 ZQ1 Lead wire length (approx. 0.3 m) 13.1 17.6 With L type plug connector 32 23 4-o3.5 Mounting hole Release flow adjusting screw
33 25
Suction filter Bracket A (standard) Supply valve 62.8 Release valve Vacuum pressure switch
(74.9)
57.3 66.9 71.9
(63.1)
Pilot exhaust port (PE port) Note 4) (M3 x 0.5, piping not required) Air supply port (P port) Note 4) (M5 x 0.8) 29.4 20.3
2 Bo -o3. dy 2 th r ho mo ough le N un ote tin 2) g
H HL RN U L M O DE S S ET HY S
(49.5)
Vacuum port (V port) Note 4) (M5 x 0.8) 9.7 Vacuum port (V port) Note 4) (M5 x 0.8) 9.7
SM C
P
30.5
20.2
3
0.8 10
(Grommet type)
17.7
22.8 107
Exhaust part
3
P
EXH
PE
V 1U-K1 -D
V F
V
D K
Note 1) The above dimensions are for ZQ1 1U-K1 5 -D C. 6 1U-K1 -F , the overall length is 87.2. In the case of ZQ1 Note 2) Dimensions marked with "" are those after bracket A is mounted. Note 3) When the body is mounted, tighten with a torque of 0.60.06 Nm. Using excessive torque may cause damage to the body. Note 4) The pitches of P, PE and V ports are determined assuming the use of the Series KJ one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. Please refer to the catalogue to confirm the sizes of the fittings to be used.
Circuit ZQ1
With L type plug connector
Type J1 1U-J1 ZQ1
-
Suction filter Supply valve Bracket A (standard) Vacuum pressure switch
(63.1)
PE
(63.1)
66.9 71.9
Pilot exhaust port (PE port) Note 4) (M3 x 0.5, piping not required) Air supply port (P port) Note 4) (M5 x 0.8)
2 Bo -o3. dy 2 th r ho mo ough le N un ote tin 2) g
H
HL
RN U
L
S MC
29.4 20.3
P
20.2
0.8
3.5 (AC type) EXH
17.7
22.8 107
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P
10
3
Exhaust part
PE V V F
1U-J1 5 L-D C. Note 1) The above dimensions are for ZQ1 6 1U-J1 -F, the overall length is 87.2. In the case of ZQ1 Note 2) The dimensions after bracket A is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.60.06 Nm. Using excessive torque may cause damage to the body. Note 4) The pitches of P, PE and V ports are determined assuming the use of the Series KJ one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. Please refer to the catalogue to confirm the sizes of the fittings to be used.
Circuit
ZQ1
1U-J1
-
D
13-9-6
k Pa V
M O DE
S
SE T
HYS
k Pa V
Compact Vacuum Ejector Dimensions
Type K2 1U-K2 ZQ1 With L type plug connector
Series
ZQ
Release flow adjusting screw
Bracket A (standard) Supply valve 62.8
Suction filter
ZX ZR ZM ZH
Vacuum port (V port) Note 4) (M5 x 0.8) 9.7
V
Release valve
(68.4)
Pilot exhaust port (PE port) Note 4) (M3 x 0.5, piping not required) Air supply port (P port) Note 4) (M5 x 0.8)
PE
2 Bo -o3. dy 2 th r ho mo ough le N un ote tin 2) g
ZU ZL ZY ZQ ZF ZP ZCU AMJ Misc.
29.4 20.3
P
20.2
0.8 10
17.7
22.8 87.2
Exhaust part
3
P
EXH
Note 1) The above dimensions are for ZQ1 1U-K2 5 L-F . 6 1U-K2 -D , the overall length is 107. In the case of ZQ1 Note 2) The dimensions after bracket A is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.60.06 Nm. Using excessive torque may cause damage to the body. Note 4) The pitches of P, PE and V ports are determined assuming the use of the Series KJ one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. Please refer to the catalogue to confirm the sizes of the fittings to be used.
PE
V 1U-K2 F
V D With L type plug connector
V
D K
Circuit ZQ1
Type J2 1U-J2 ZQ1
-
Supply valve Bracket A (standard)
Suction filter
(68.4)
Pilot exhaust port (PE port) Note 4) (M3 x 0.5, piping not required) Air supply port (P port) Note 4) (M5 x 0.8)
PE
2 Bo -o3.2 dy th ro ho mo ugh le N un ote tin 2) g
57.3
29.4 20.3
P
20.2
Vacuum port (V port) Note 4) (M5 x 0.8)
V
0.8 10
17.7
22.8 87.2
Exhaust part
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P PE V V F D EXH
3
Note 1) The above dimensions are for ZQ1 1U-J2 5 L-F. 6 , the overall length is 107. 1U-J2 -D In the case of ZQ1 Note 2) The dimensions after bracket A is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.60.06 Nm. Using excessive torque may cause damage to the body. Note 4) The pitches of P, PE and V ports are determined assuming the use of the Series KJ one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. Please refer to the catalogue to confirm the sizes of the fittings to be used.
Circuit
ZQ1
1U-J2
-
9.7
13-9-7
Series
ZQ
0 B With L type plug connector
A
Dimensions
Type Q1 1U-Q1 ZQ1
Release flow adjusting screw
Supply valve
Bracket A (standard) Suction filter Vacuum pressure switch Release valve 62.8
57.3 66.9 71.9
(63.1)
Pilot exhaust port (PE port) Note 4) (M3 x 0.5, piping not required) Air supply port (P port) Note 4) (M5 x 0.8)
PE
2Bo o3.2 dy thr mo ho ou ugh le N nti ote ng 2)
H HL RN U L MO D E S SET HY S
29.4 20.3
P
20.2
Vacuum port (V port) Note 4) (M5 x 0.8) 9.7 Vacuum port (V port) Note 4) (M5 x 0.8) 9.7
S MC
0.8 10
17.7 3.5
22.8 107
Exhaust part
3
P
EXH
PE
V ZQ1 1U-Q1 -D
V F
V
D K
Note 1) The above dimensions are for ZQ1 1U-G1 5 L-D C. 6 1U-Q1 -F , the overall length is 87.2. In the case of ZQ1 Note 2) The dimensions after bracket A is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.60.06 Nm. Using excessive torque may cause damage to the body. Note 4) The pitches of P, PE and V ports are determined assuming the use of the Series KJ one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. Please refer to the catalogue to confirm the sizes of the fittings to be used.
Circuit
With L type plug connector
Type Q2 1U-Q2 ZQ1
-
Suction filter Supply valve Bracket A (standard) Vacuum pressure switch
PE
(63.1)
66.9 71.9
Pilot exhaust port (PE port) Note 4) (M3 x 0.5, piping not required) Air supply port (P port) Note 4) (M5 x 0.8)
2Bo o3.2 dy thr mo ho ou ugh le N nti ote ng 2)
H
HL
RN U
L
S MC
29.4 20.3
P
20.2
0.8 10
17.7 3.5
22.8 107
Exhaust part
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P EXH
3
PE V V F
Note 1) The above dimensions are for ZQ1 1U-G2 5 L-D C. 6 1U-G2 -F, the overall length is 87.2. In the case of ZQ1 Note 2) The dimensions after bracket A is mounted are the same as those of the K1 type. Note 3) When the body is mounted, tighten with a torque of 0.60.06 Nm. Using excessive torque may cause damage to the body. Note 4) The pitches of P, PE and V ports are determined assuming the use of the Series KJ one-touch fittings. If used with other fittings, these may cause interference, dependant on their type and size. Please refer to the catalogue to confirm the sizes of the fittings to be used.
Circuit
ZQ1
1U-Q2
-
D
13-9-8
k Pa V
MO D E
S
SET
HY S
k Pa V
0
B A
Compact Vacuum Ejector Dimensions
Manifold type -BSB ZZQ1 3MZQ1
Series
ZQ
5.5 Body mounting hole Note 1)
)
Supply port
3.5
75 2R1 .
Pilot exhaust port (PE port) (One-touch fitting for applicable tubing diameter of o4, piping not required) Common air supply port (P port) (One-touch fitting for applicable tubing diameter of o8) Release valve
P
(
ZX ZR ZM ZH ZU ZL
13
L2 L1 (Pitch) P =10
8
2-o3.5 (Body mounting hole Note 1)) With L type plug connector
3
PE
H
H
H
HY S
HY S
HY S
H
HL
HL
HL
SET
SET
SET
HL
L
L
L
RN U
RN U
RN U
MO D E
MO D E
MO D E
RN U
L
MO D E
SET
HY S
S
S
S
(63.6) (60.1)
SMC
SMC
SMC
k Pa
k Pa
k Pa
SMC
V
V V V V
9 8.5
8.5 9
28.8 81 107
10.2
21
10
Vacuum port (V port) Note 4) (M5 x 0.8)
Dimensions
n
1
26 52
2
36 52
3
46 62
4
56 72
n: Number of stations (mm) 5 6 7 8
66 82 76 92 86 102 96 112
L1 L2
Note 1) The above dimensions are for ZZQ1 -BSB. 3M-K10 5 L-D C. ZQ1 6 -F , the overall length is 87.2. 3MIn the case of ZQ1 Note 2) Dimensions marked with "" are those after the attached square bracket is mounted. Note 3) When the body is mounted, tighten with a torque of 0.60.06 Nm. Using excessive torque may cause damage to the body. Note 4) The pitches of V ports are determined assuming the use of the Series KJ onetouch fittings. If used with other fittings, these may cause interference, dependant on their type and size. Please refer to the catalogue to confirm the sizes of the fittings to be used.
EXH P PE
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EXH P PE
V
V ZQ1 3M-K2 -D K ZQ1 3M-J1
V -F ZQ1 3M-Q1
V -FK
Circuit ZQ1
3M-K1
-D
13-9-9
k Pa
Attached washer
Attached washer
(72.4)
S
PE PE
Release flow adjusting screw
P
ZY ZQ ZF ZP ZCU AMJ Misc.
62.8 75
Exhaust part Suction filter Vacuum pressure switch
P
EXH
Series
ZQ
Manifold Exploded View
3 6
6
4 6 b 4 6
b view
2
a 5
a 5
5
Component Parts
No. q w e r t y Description Hexagon socket head cap screw End block R End block L Ejector assembly Ejector body gasket for manifold Exhaust block gasket Part no. Refer to "How to Order".
ZQ1R-1-BSB-AS ZQ1L-1-BSB-AS ZQ1 3MZQ-3-005 ZQ-3-009
1
Note)
Note) Refer to page 13-9-5 for detailed description of "How to Order".
How to Order Hexagon Socket Head Cap Screw
Working Procedure
Disassembly
Loosen and remove the hexagon socket head cap bolts q.
XT534 - 4 - 0 05
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Number of stations
05 06
* * * * *
Assembly
1 station 2 station
* * * * *
12
8 station
1. Install the ejector body gasket for manifold t into the gasket groove of each ejector assembly r. Install the exhaust block gasket y around the projected part. 2. Install the exhaust block gasket y around the projected part of the end block R w. 3. Install the ejector body gasket for manifold t into the gasket groove of the end block L e. 4. Align the ejector assemblies r, end block (R) w, and end block (L) e using positioning pins (at the two "a" positions) and fasten with a hexagon socket head cap bolts q (2 pcs.) (with a tightening torque of 0.6 Nm0.06 Nm).
13-9-10

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