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Freescale Semiconductor Technical Data MPX4080D Rev 2, 05/2005 Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX4080D series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features * * * * 3.0% Maximum Error over 0 to 85C Ideally suited for Microprocessor or Microcontroller-Based Systems Temperature Compensated from -40 to 105C Easy-to-Use, Durable Epoxy Unibody Package MPX4080D INTEGRATED PRESSURE SENSOR 0 TO 80 kPA (0 TO 11.6 psi) 0.58 TO 4.9 V OUTPUT MPX4080D CASE 867-08 ORDERING INFORMATION Device MPX4080D Device Type Differential Case No. 867 Device Marking MPX4080D 1 2 3 PIN NUMBERS Vout GND VS 4 5 6 NC NC NC Note: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead. (c) Freescale Semiconductor, Inc., 2005. All rights reserved. Figure 1 shows a block diagram of the internal circuitry integrated on the pressure sensor chip. VS Sensing Element Thin Film Temperature Compensation and Gain Stage #1 Gain Stage #2 and Ground Reference Shift Circuitry Vout Pins 4, 5, and 6 Are NO CONNECTS GND Figure 1. Fully Integrated Pressure Sensor Schematic Table 1. Maximum Ratings (1) Rating Maximum Pressure Storage Temperature (P1 > P2) (P2 > P1) Symbol Pmax Tstg Value 400 400 -40 to +125 Unit kPa C 1. Exposure beyond the specified limits may cause permanent damage or degradation to the device. Table 2. Operating Characteristics (VS = 5.1 Vdc, TA = 25xC unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4 required to meet electrical specifications.) Characteristic Pressure Range Supply Voltage Supply Current Minimum Pressure Offset(3)(0 to 85C) @ VS = 5.1 V Full Scale Output(4)(0 to 85C) @ VS = 5.1 V Full Scale Span(5)(0 to 85C) @ VS = 5.1 V Accuracy(6) Sensitivity 1. 0kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from minimum or maximum rated pressure at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS at 25C. (1) (2) Symbol POP VS Io Voff VFSO VFSS -- V/P Min 0 4.85 -- 0.478 4.772 -- -- -- Typ -- 5.1 7.0 0.575 4.900 4.325 -- 54 Max 80 5.35 10 0.672 5.020 -- 3.0 -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa MPX4080D 2 Sensors Freescale Semiconductor ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING Figure 2 shows the sensor output signal relative to differential pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C using the decoupling circuit shown in Figure 4. The output will saturate outside of the specified pressure range. 5 4.5 4 3.5 Output (V) 3 2.5 2 1.5 1 0.5 kPa PSI 0 0 VS = 5.1 Vdc TA = 25C MPX4080 Span Range (TYP) 50 60 70 80 Stainless Steel Metal Cover Die Bond Vout OUTPUT IPS 470 pF TYP MAX MIN 10 20 30 40 Pressure (kPa) Offset (TYP) Figure 2. Output versus Pressure Differential Fluoro Silicone Gel Die Coat Wire Bond Die Epoxy Plastic Case Lead Frame Differential/Gauge Element Figure 3. Cross-Sectional Diagrams (Not to Scale) Figure 3 illustrates the differential sensing chip in the basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. The MPX4080D pressure sensor operating characteristics, internal reliability, and qualification tests are based on use of dry air as the pressure media. Media, other +5.0 V than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 4 shows the recommended decoupling circuit for interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended. Vs 1.0 F 0.01 F GND Figure 4. Recommended Power Supply Decoupling and Output Filter (For additional output filtering information, refer to Application Note AN1646.) MPX4080D Sensors Freescale Semiconductor 3 Output Range (TYP) Transfer Function (MPX4080D) Nominal Transfer Value: Vout = VS (P x 0.01059 + 0.11280) (Pressure Error x Temp. Mult. x 0.01059 x VS) VS = 5.1 V 0.25 V P kPa Temperature Error Multiplier MPX4080D 4.0 3.0 2.0 1.0 0.0 -40 -20 0 20 Temp. - 40 0 to 85 +105 Multiplier 3 1 2 40 60 80 100 120 130 140 Temperature in C NOTE: The Temperature Multiplier is a linear response from 0 to -40C and from 85 to 105C. Pressure Error Band 3.0 2.0 Error (kPa) 1.0 0.0 -1.0 -2.0 -3.0 0 Error Limits for Pressure 20 40 60 80 100 120 Pressure in kPa MPX4080D Pressure 0 to 6 kPa 0 to 60 kPa 60 to 80 kPa Error (max) 1.8 kPa 1.5 kPa 2.3 kPa PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE The two sides of the pressure sensor are designated as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluorosilicone gel which protects the die from harsh media. The pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side is identified by the stainless steel cap. MPX4080D 4 Sensors Freescale Semiconductor PACKAGE DIMENSIONS C R M B -AN PIN 1 SEATING PLANE 1 2 3 4 5 6 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). INCHES MILLIMETERS MIN MAX MIN MAX 0.595 0.630 15.11 16.00 0.514 0.534 13.06 13.56 0.200 0.220 5.08 5.59 0.027 0.033 0.68 0.84 0.048 0.064 1.22 1.63 0.100 BSC 2.54 BSC 0.014 0.016 0.36 0.40 0.695 0.725 17.65 18.42 30 NOM 30 NOM 0.475 0.495 12.07 12.57 11.43 0.430 0.450 10.92 0.090 0.105 2.29 2.66 L -TG F D 6 PL 0.136 (0.005) M J S TA M DIM A B C D F G J L M N R S OPEN GROUND +VOUT +VSUPPLY -VOUT OPEN STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX STYLE 2: PIN 1. 2. 3. 4. 5. 6. OPEN GROUND -VOUT VSUPPLY +VOUT OPEN STYLE 3: PIN 1. 2. 3. 4. 5. 6. CASE867-08 ISSUE N BASIC ELEMENT MPX4080D Sensors Freescale Semiconductor 5 NOTES MPX4080D 6 Sensors Freescale Semiconductor NOTES MPX4080D Sensors Freescale Semiconductor 7 How to Reach Us: Home Page: www.freescale.com E-mail: support@freescale.com USA/Europe or Locations Not Listed: Freescale Semiconductor Technical Information Center, CH370 1300 N. Alma School Road Chandler, Arizona 85224 +1-800-521-6274 or +1-480-768-2130 support@freescale.com Europe, Middle East, and Africa: Freescale Halbleiter Deutschland GmbH Technical Information Center Schatzbogen 7 81829 Muenchen, Germany +44 1296 380 456 (English) +46 8 52200080 (English) +49 89 92103 559 (German) +33 1 69 35 48 48 (French) support@freescale.com Japan: Freescale Semiconductor Japan Ltd. Headquarters ARCO Tower 15F 1-8-1, Shimo-Meguro, Meguro-ku, Tokyo 153-0064 Japan 0120 191014 or +81 3 5437 9125 support.japan@freescale.com Asia/Pacific: Freescale Semiconductor Hong Kong Ltd. Technical Information Center 2 Dai King Street Tai Po Industrial Estate Tai Po, N.T., Hong Kong +800 2666 8080 support.asia@freescale.com For Literature Requests Only: Freescale Semiconductor Literature Distribution Center P.O. Box 5405 Denver, Colorado 80217 1-800-441-2447 or 303-675-2140 Fax: 303-675-2150 LDCForFreescaleSemiconductor@hibbertgroup.com Information in this document is provided solely to enable system and software implementers to use Freescale Semiconductor products. There are no express or implied copyright licenses granted hereunder to design or fabricate any integrated circuits or integrated circuits based on the information in this document. Freescale Semiconductor reserves the right to make changes without further notice to any products herein. Freescale Semiconductor makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Freescale Semiconductor assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters that may be provided in Freescale Semiconductor data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals", must be validated for each customer application by customer's technical experts. Freescale Semiconductor does not convey any license under its patent rights nor the rights of others. Freescale Semiconductor products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Freescale Semiconductor product could create a situation where personal injury or death may occur. Should Buyer purchase or use Freescale Semiconductor products for any such unintended or unauthorized application, Buyer shall indemnify and hold Freescale Semiconductor and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Freescale Semiconductor was negligent regarding the design or manufacture of the part. FreescaleTM and the Freescale logo are trademarks of Freescale Semiconductor, Inc. All other product or service names are the property of their respective owners. (c) Freescale Semiconductor, Inc. 2005. All rights reserved. MPX4080D Rev. 2 05/2005 |
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