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LMC2001 Qualification Package Precision Over Time LMC2001 Op Amp LMC2001 Op Amp -- Precision Over Time 90 80 VOS Drift (nV) 70 60 50 SOT23-5 3 mm 3 mm 40 30 20 10 0 0 5 10 Years 15 20 Industry's most precise Op Amp ever in a very small package - the SOT23-5. * VOS Drift: 5V Over 10 Years Guaranteed! * No 1/f Noise at Any Frequency * 6MHz Gain Bandwidth Product 750A Supply Current @ 5V * SOT23-5 Packaging LMC2001 QUALIFICATION PACKAGE Fall 1998 Table of Contents 1.0 Introduction 1.1 General Product Description. . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.2 Technical Product Description . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 1.3 Reliability/Qualification Overview. . . . . . . . . . . . . . . . . . . . . . 1-1 1.4 Technical Assistance. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 1-1 2.0 Device Information 2.1 Datasheet. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 2-1 3.0 Process Information 3.1 Process Flow. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 3.2 Process Detail & Masks . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-1 3.3 Masking Sequence. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-2 4.0 Packaging Information 4.1 Package Material . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-1 4.2 Dimensions . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2 4.2.1 Tape and Reel. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-2 4.2.2 Package . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-4 4.3 Bonding Diagrams . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 4-6 5.0 Reliability Data 5.1 Reliability Report . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-1 5.2 ESD Latch-Up . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 5-4 6.0 Characterization Data 6.1 Test Summary . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-1 6.2 Test Graphs . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 6-2 1.0 INTRODUCTION 1.0 INTRODUCTION 1.1 General Product Description This qualification booklet covers a general purpose Op Amp. It is available in 2 different package. Single Op Amp LMC2001ACM5/ACM5X (5 lead SOT-23 package) LMC2001AIM/AIMX (8 lead SOIC package) It features low voltage operation (4.75V to 5.25V) and is designed for applications where low power, small size, and price are main objectives. LMC2001 Op Amp offers enhanced performance over that of the OP0x series Op Amps. The LMC2001 offers precision at a price you can afford. 1.2 Technical Product Description The LMC2001 is manufactured using National's advanced Submicron Silicon Gate BiCMOS process. The Internal name for this process is CS80CBi, which uses 6-inch wafers. The LMC2001 is a unique precision amplifier which features a low (<40V) offset combined with a high 6MHz-gain bandwidth. The LMC2001 still fits in an SOT23-5 package and combines excellent precision performance with a superb transient response. The LMC2001 can therefore be used in dynamic applications where conventional chopper amplifiers could not deliver the desired AC performance. The quiescent current is still a mere 750A. The LMC2001 obtains these features by using a proprietary dynamic offset correction technique and will meet full precision spec within 30ms of power-up. This technique offers continuous offset correction, eliminating offset drift caused by supply voltage and temperature changes. 1.3 Reliability/Qualification Overview LMC2001 Because the same wafer fab process and package types are used on the LMV324 product, LMC2001 is qualified by reliability testing and qualified by extension. Copies of all reliability test reports listed below can be found under Reliability Reports section 5.0 later in this qualification booklet. Q19960526 LMC2001 in SOT-23 and SOIC 1.4 Technical Assistance Product Engineers John W. Dell email: John.Dell@nsc.com Tel: 408.721.2852 Solaiman M. Harooni email: Solaiman.M.Harooni@nsc.com Tel: 408.721.3703 Application Engineers John W Christensen email: John.W.Christensen@nsc.com phone: (408) 721-6815 Hooman Hashemi email: Hooman.Hashemi@nsc.com phone: (408) 721-8771 LMC2001 Qualification Package 1-1 2.0 DEVICE INFORMATION 2.0 DEVICE INFORMATION 2.1 Datasheet LMC2001 High Precision, 6MHz Rail-To-Rail Output Operational Amplifier October 1998 LMC2001 High Precision, 6MHz Rail-To-Rail Output Operational Amplifier General Description The LMC2001 is a new precision amplifier that offers unprecedented accuracy and stability at an affordable price and is offered in miniature (SOT23-5) package. This device utilizes patented techniques to measure and continually correct the input offset error voltage. The result is an amplifier which is ultra stable over time, and temperature. It has excellent CMRR and PSRR ratings, and does not exhibit the familiar 1/f voltage and current noise increase that plagues traditional amplifiers. The combination of the LMC2001 characteristics makes it a good choice for transducer amplifiers, high gain configurations, ADC buffer amplifiers, DAC I-V conversion, and any other 5V application requiring precision and/or stability. Other useful benefits of the LMC2001 are rail-to-rail output, low supply current of 750A, and wide gain-bandwidth product of 6MHz. The LMC2001 comes in 5 pin SOT23 and 8 pin SOIC. These extremely versatile features found in the LMC2001 provide high performance and ease of use. Features (Vs = 5V, RL = 10K to V+ /2, Typ. Unless Noted) n Low Guaranteed Vos 40V 85nV/ n en With No 1/f n High CMRR 120dB n High PSRR 120dB 137dB n High AVOL n Wide Gain-Bandwidth Product 6MHz n High Slew Rate 5V/s n Low Supply Current 750A n Rail-To-Rail Output 30mV from either rail n No External Capacitors Required Applications n Precision Instrumentation Amplifiers n Thermocouple Amplifiers n Strain Gauge Bridge Amplifier Connection Diagrams 8-Pin SO 5-Pin SOT23 DS100058-1 DS100058-2 Top View Top View Ordering Information Package Temperature Range Commercial 0C to +70C 8-pin Small Outline Industrial -40C to +85C LMC2001AIM LMC2001AIMX 5-pin SOT23-5 LMC2001ACM5 LMC2001ACM5X A09A LMC2001AIM Rails 2.5K Tape and Reel 250 Tape and Reel 3K Tape and Reel MA05B M08A Package Marking Transport Media NSC Drawing (c) 1998 National Semiconductor Corporation DS100058 www.national.com LMC2001 Qualification Package 2-1 2.0 DEVICE INFORMATION Absolute Maximum Ratings (Note 1) If Military/Aerospace specified devices are required, please contact the National Semiconductor Sales Office/ Distributors for availability and specifications. ESD Tolerance (Note 2) Human Body Model Machine Model Differential Input Voltage Supply Voltage (V+ - V-) Current At Input Pin Current At Output Pin Current At Power Supply Pin (Note 3) Lead Temperature (soldering, 10 sec) 2500V 150V Storage Temperature Range Junction Temperature (TJ ) (Note 4) -65C to 150C 150C Operating Ratings (Note 1) Supply voltage Temperature Range LMC2001AI LMC2001AC Thermal resistance ( JA) 4.75V to 5.25V -40C TJ 85C 0C TJ 70C 180C /W 274C /W Supply Voltage 5.6V 30mA 30mA 50mA M Package, 8-pin Surface Mount M5 Package, SOT23-5 260C DC Electrical Characteristics Unless otherwise specified, all limits guaranteed for T Boldface limits apply at the temperature extremes. Symbol VOS Parameter Input Offset Voltage Offset Calibration Time TCVOS Input Offset Voltage Long-Term Offset Drift Lifetime VOS drift IIN IOS RIND CMRR Input Current Input Offset Current Input Differential Resistance Common Mode Rejection Ratio 0V VCM 3.5V 0.1V VCM 3.5V PSRR AVOL Power Supply Rejection Ratio Large Signal Voltage Gain (Note 7) 4.75V V+ 5.25V RL= 10k RL = 2k VO Output Swing RL = 10k to 2.5V VIN(diff) = 0.5V (Note 12) (Note 8) (Note 8) (Note 9) J = 25C, V+ = 5V, V- = 0V, V CM = 2.5V, VO = 2.5V and RL > 1M. Limit(Note 6) 40 60 30 Units V max ms V/C V/month 5 V Max pA pA M 100 90 95 90 105 100 95 90 4.955 4.955 0.060 0.060 V min V max V V 4.1 1.5 4.5 1.5 1.0 1.2 mA min mA min mA max dB min dB min dB min dB min Conditions (Note 11) Typ (Note 5) 0.5 5 0.015 0.006 2.5 -3 6 9 120 110 120 137 128 4.975 0.030 RL = 2k to 2.5V VIN(diff) = 0.5V IO Output Current Sourcing, VO = 0V VIN(diff) = 0.5V Sinking, VO = 5V V IN(diff) = 0.5V IS Supply Current 4.936 0.075 5.9 14.5 0.75 www.national.com 2 2-2 2.0 DEVICE INFORMATION AC Electrical Characteristics TJ = 25C, V+ = 5V, V - = 0V, VCM = 2.5V, VO = 2.5V, and RL > 1M. Symbol SR GBW m Gm en enp-p in THD trec TS Parameter Slew Rate Gain-Bandwidth Product Phase Margin Gain Margin Input-Referred Voltage Noise Input-Referred Voltage Noise Input-Referred Current Noise Total Harmonic Distortion Input Overload Recovery Time Output Settling time (Note 10) AV = +1, 1V step 1% 0.1% 0.01% (Note 10)AV = -1, 1V step 1% 0.1% 0.01% f = 0.1Hz RS = 100, DC to 10Hz f = 0.1Hz f = 1kHz, Av = -2 RL = 10k,VO = 4.5Vpp AV = +1, Vin=3.5Vpp Conditions Typ (Note 5) 5 6 75 12 85 1.6 180 0.02 50 250 400 3200 80 860 1400 Units V/s MHz Deg dB nV/ Vpp fA/ % ms ns Note 1: Absolute Maximum Ratings indicate limits beyond which damage to the device may occur. Operating Ratings indicate conditions for which the device is intended to be functional, but specific performance is not guaranteed. For guaranteed specifications and test conditions, see the Electrical Characteristics. Note 2: Human body model, 1.5k in series with 100pF. Machine model, 200 in series with 100pF. Note 3: Output currents in excess of 30mA over long term may adversely affect reliability. Note 4: The maximum power dissipation is a function of TJ(max), JA, and TA. The maximum allowable power dissipation at any ambient temperature is PD = (TJ(max) - TA)/ JA. All numbers apply for packages soldered directly onto a PC board. Note 5: Typical values represent the most likely parametric norm. Note 6: All limits are guaranteed by testing or statistical analysis, unless otherwise noted. Note 7: V+ = 5V, VCM = 2.5V, and RL connected to 2.5V. For Sourcing tests, 2.5V VO 4.8V. For Sinking tests, 0.2V V O 2.5V. Note 8: Guaranteed Vos Drift is based on 280 devices operated for 1000 hrs at 150C (equivalent to 30 years 55C). Note 9: Guaranteed by design only. Note 10: Settling times shown correspond to the worse case (positive or negative step) and does not include slew time. See the Application Note section for test schematic. Note 11: The limits are set by the accuracy of high speed automatic test equipment. For the typical VOS distribution, see the curve on page 4. Note 12: Precision bench measurement of more than 300 units. More than 65% of units had less than 15nV /C VOS drift. 3 www.national.com LMC2001 Qualification Package 2-3 2.0 DEVICE INFORMATION Typical Performance Characteristics TA = 25C, VS = 5V unless otherwise specified. VOS Distribution VOS vs VS VOS vs VCM DS100058-63 DS100058-91 DS100058-97 +IIN vs VCM -IINvs VCM eN vs Frequency DS100058-68 DS100058-A4 DS100058-A0 CMR vs VCM CMR vs Frequency PSR vs Frequency DS100058-65 DS100058-92 DS100058-66 VOUT+ vs VS VOUT+ vs VS VOUT- vs VS DS100058-89 DS100058-88 DS100058-99 www.national.com 4 2-4 2.0 DEVICE INFORMATION Typical Performance Characteristics VOUT- vs VS (Continued) Gain-Phase vs VS Gain-Phase vs Temp DS100058-98 DS100058-49 DS100058-48 Gain-Phase vs RL Gain-Phase vs CLOAD THD+N vs Frequency DS100058-50 DS100058-47 DS100058-A5 THD+N vs VOUT Isource vs VOUT Isink vs VOUT DS100058-76 DS100058-A7 DS100058-A8 Isupply vs VS DS100058-96 5 www.national.com LMC2001 Qualification Package 2-5 2.0 DEVICE INFORMATION Application Notes The Benefits of LMC2001 No 1/f Noise Using patented methods, the LMC2001 eliminates the 1/f noise present in other amplifiers. This noise which increases as frequency decreases is a major source of measurement error in all DC coupled measurements. Low frequency noise appears as a constantly changing signal in series with any measurement being made. As a result, even when the measurement is made rapidly, this constantly changing noise signal will corrupt the result. The value of this noise signal can be surprisingly large. For example: If a conventional amplifier has a high frequency noise level of 10nV/ and a noise corner of 10 Hz, the RMS noise at 0.001 Hz is 1V/ This is equivalent to a 6V peak-to-peak error. In a circuit with a gain of 1000, this produces a 6mV peak-to-peak output error. This number of 0.001 Hz might appear unreasonably low but when a data acquisition system is operating for 17 minutes it has been on long enough to include this error. In this same time, the LMC2001 will only have a 0.51mV output error. This is more than 13.3 times less error. Keep in mind that this 1/f error gets even larger at lower frequencies. At the extreme, many people try to reduce this error by integrating or taking several samples of the same signal. This is also doomed to failure because the 1/f nature of this noise means that taking longer samples just moves the measurement into lower frequencies where the noise level is even higher. The LMC2001 eliminates this source of error. The noise level is constant with frequency so that reducing the bandwidth reduces the errors caused by noise. Another source of error that is rarely mentioned is the error voltages caused by the inadvertent thermocouples created when the common "Kovar type" package lead materials are soldered to a copper printed circuit board. These steel based leadframe materials can produce over 35uV/C when soldered onto a copper trace. This can result in thermocouple noise that is equal to the LMC2001 noise when there is a temperature difference of only 0.0014C between the lead and the board! For this reason, the leadframe of the LMC2001 is made of copper. This results in equal and opposite junctions which cancel this effect. The extremely small size of the SOT-23 package results in the leads being very close together. This further reduces the probability of temperature differences and hence decreases thermal noise. Overload Recovery The LMC2001 recovers from input overload much faster than most chopper stabilized opamps. Recovery, from driving the amplifier to 2X the full scale output, only requires about 50ms. Most chopper stabilized amplifiers will take from 250ms to several seconds to recover from this same overload. This is because large capacitors are used to store the unadjusted offset voltage. The wide bandwidth of the LMC2001 enhances performance when it is used as an amplifier to drive loads that inject transients back into the output. A to Ds and multiplexers are examples of this type of load. To simulate this type of load, a pulse generator producing a 1V peak square wave was connected to the output through a 10pF capacitor. (Figure 1) The typical time for the output to recover to 1% of the applied pulse is 80ns. To recover to 0.1% requires 860ns. This rapid recovery is due to the wide bandwidth of the output stage and large total GBW. DS100058-B0 FIGURE 1. No External Capacitors Required The LMC2001 does not need external capacitors. This eliminates the problems caused by capacitor leakage and dielectric absorption, which can cause delays of several seconds from turn-on until the amplifier is settled. More Benefits The LMC2001 offers the benefits mentioned above and more. It is rail-to-rail output and consumes only 750A of supply current while providing excellent DC and AC electrical performance. In DC performance, the LMC2001 achieves 120dB of CMRR, 120dB of PSRR and 137dB of open loop gain. In AC performance, the LMC2001 provides 6MHz of gain-bandwidth product and 5V/s of slew rate. How the LMC2001 Works The LMC2001 uses new, patented techniques to achieve the high DC accuracy traditionally associated with chopper stabilized amplifiers without the major drawbacks produced by chopping. The LMC2001 continuously monitors the input offset and corrects this error. The conventional chopping process produces many mixing products, both sums and differences, between the chopping frequency and the incoming signal frequency. This mixing causes large amounts of distortion, particularly when the signal frequency approaches the chopping frequency. Even without an incoming signal, the chopper harmonics mix with each other to produce even more trash. If this sounds unlikely or difficult to understand, look at the plot (Figure 2), of the output of a typical (MAX432) chopper stabilized opamp. This is the output when there is no incoming signal, just the amplifier in a gain of -10 with the input grounded. The chopper is operating at about 150Hz, the rest is mixing products. Add an input signal and the mess gets much worse. Compare this plot with Figure 3 of the LMC2001. This data was taken under the exact same conditions. The auto zero action is visible at about 11kHz but note the absence of mixing products at other frequencies. As a result, the LMC2001 has very low distortion of 0.02% and very low mixing products. Input Currents The LMC2001 input current is different than standard bipolar or CMOS input currents in that it appears as a current flowing in one input and out the other. Under most operating conditions, these currents are in the picoamp level and will have little or no effect in most circuits. These currents increase to the nA level when the common-mode voltage is near the minus supply. (see the typical curves) At high temperatures such as 85C, the input currents become larger, 0.5nA typical, and are both positive except when the Vcm is near V-. If operation is expected at low common-mode voltages and high temperature, do not add resistance in series with the inputs to balance the impedances. Doing this can cause an increase in offset voltage. www.national.com 6 2-6 2.0 DEVICE INFORMATION Application Notes (Continued) eration). Higher closed loop gains are also possible with a corresponding reduction in realizable bandwidth. Table 1 shows some other closed loop gain possibilities along with the measured performance in each case Application Circuits DS100058-A1 FIGURE 2. DS100058-21 FIGURE 4. Single Supply Strain- Gauge Amplifier DS100058-A0 FIGURE 3. This Strain-Gauge (Figure 4) amplifier provides high gain (1006 or 60 dB) with very low offset and drift. Using the resistors tolerance as shown, the worst case CMRR will be greater than 90 dB. The common-mode gain is directly related to the resistor mismatch and is independent of the differential gain that is set by R3. The worst case commonmode gain is -54 dB. This gain becomes even lower, improving CMRR, if the resistor ratio matching is improved. FIGURE 5. Inverting Composite Amplifier Extending Supply Voltages and Output Swing by Using a Composite Amplifier Configuration: In cases where substantially higher output swing is required with higher supply voltages, arrangements like the ones shown in Figure 5, and Figure 6 could be used (pin numbers shown are for SO-8 package). These configurations utilize the excellent DC performance of the LMC2001 while at the same time allow the superior voltage and frequency capabilities of the LM6171 to set the dynamic performance of the overall amplifier. For example, it is possible to achieve 12V output swing with 300MHz of overall GBW (Av=100) while keeping the worst case output shift due to Vos less than 4mV. The LMC2001 output voltage is kept at about mid-point of it's overall supply voltage and it's input common mode voltage range allows the V- terminal to be grounded in one case (Figure 5, inverting operation) and tied to a small noncritical negative bias in another (Figure 6, non-inverting op7 www.national.com DS100058-30 LMC2001 Qualification Package 2-7 2.0 DEVICE INFORMATION Application Notes (Continued) minimize the overall bandwidth. As can be seen from Equation 1 above, the improvement in output noise has a square law relationship to the reduction in BW. In the case of the inverting configuration, it is also possible to increase the input impedance of the overall amplifier, by raising the value of R1, without having to increase the feedback resistor, R2, to impractical values, by utilizing a "T" network as feedback. See the LMC6442 data sheet (Application Notes section) for more details on this. LMC2001 as ADC Input Amplifier The LMC2001 is a great choice for an amplifier stage immediately before the input of an A/D converter (AC or DC coupled) see Figure 7 and Figure 8 because of the following important characteristics: a) Very low offset voltage and offset voltage drift over time and temperature allow a high closed loop gain setting without introducing any short term or long term errors. For example, when set to a closed loop gain of 100 as the analog input amplifier of a 12 bit A/D converter, the overall conversion error over full operation temperature and 30 years life of the part (operating at 50C) would be less than 5LSB. b) Fast large signal settling time to 0.01% of final value (1.4 us) allows 12 bit accuracy at 100KHz or more sampling rate. c) No flicker (1/f) noise means unsurpassed data accuracy over any measurement period of time, no matter how long. Consider the following opamp performance, based on a typical commercially available device, for comparison: Opamp flatband noise 1/f0.94 corner frequency f(max) Av 8nV/ 100Hz 100Hz 100 DS100058-31 FIGURE 6. Non-Inverting Composite Amplifier TABLE 1. Composite Amplifier Measured Performance Av 50 100 100 500 1000 R1 (ohm) 200 100 1K 200 100 R2 (ohm) 10K 10K 100K 100K 100K C2 (pF) 8 10 0.67 1.75 2.2 BW (MHz) 3.3 2.5 3.1 1.4 0.98 SR (V/us) 178 174 170 96 64 enpp (mVpp) 37 70 70 250 400 In terms of the measured output peak-to-peak noise, the following relationship holds between output noise voltage, enpp, for different closed loop gain, Av, settings, where -3dB Bandwidth is BW: (1) It should be kept in mind that in order to minimize the output noise voltage for a given closed loop gain setting, one could Measurement time 100 sec The example above, will result in about 3mVpp (2.5LSB) of output noise contribution due to the opamp alone, compared to about 420 uVpp (less than 1LSB) when that opamp is replaced with the LMC2001 which has no 1/f contribution. If the measurement time is increased from 100 sec. to 1 hr., the improvement realized by using the LMC2001 would be a factor of about 44 times (18.5mVpp compared to 420uV when LMC2001 is used) mainly because the LMC2001 accuracy is not compromised by increasing the observation time. d) Copper lead frame construction minimizes any thermocouple effects which would degrade low level/high gain data conversion application accuracy (see discussion under "The Benefits of the LMC2001" section above). e) Rail-to-Rail output swing maximized the ADC dynamic range in 5V single supply converter applications. Below are some typical block diagrams showing the LMC2001 used as an ADC amplifier (Figure 7 and Figure 8). www.national.com 8 2-8 2.0 DEVICE INFORMATION Application Notes (Continued) DS100058-52 FIGURE 7. DS100058-53 FIGURE 8. 9 www.national.com LMC2001 Qualification Package 2-9 2.0 DEVICE INFORMATION 10 2-10 2.0 DEVICE INFORMATION Physical Dimensions inches (millimeters) unless otherwise noted M08A 11 www.national.com LMC2001 Qualification Package 2-11 2.0 DEVICE INFORMATION LMC2001 High Precision, 6MHz Rail-To-Rail Output Operational Amplifier Physical Dimensions inches (millimeters) unless otherwise noted (Continued) MA05B LIFE SUPPORT POLICY NATIONAL'S PRODUCTS ARE NOT AUTHORIZED FOR USE AS CRITICAL COMPONENTS IN LIFE SUPPORT DEVICES OR SYSTEMS WITHOUT THE EXPRESS WRITTEN APPROVAL OF THE PRESIDENT OF NATIONAL SEMICONDUCTOR CORPORATION. As used herein: 2. A critical component in any component of a life support 1. Life support devices or systems are devices or sysdevice or system whose failure to perform can be reatems which, (a) are intended for surgical implant into sonably expected to cause the failure of the life support the body, or (b) support or sustain life, and whose faildevice or system, or to affect its safety or effectiveness. ure to perform when properly used in accordance with instructions for use provided in the labeling, can be reasonably expected to result in a significant injury to the user. National Semiconductor Corporation Americas Tel: 1-800-272-9959 Fax: 1-800-737-7018 Email: support@nsc.com National Semiconductor Europe Fax: +49 (0) 1 80-530 85 86 Email: europe.support@nsc.com Deutsch Tel: +49 (0) 1 80-530 85 85 English Tel: +49 (0) 1 80-532 78 32 Francais Tel: +49 (0) 1 80-532 93 58 Italiano Tel: +49 (0) 1 80-534 16 80 National Semiconductor Asia Pacific Customer Response Group Tel: 65-2544466 Fax: 65-2504466 Email: sea.support@nsc.com National Semiconductor Japan Ltd. Tel: 81-3-5620-6175 Fax: 81-3-5620-6179 www.national.com National does not assume any responsibility for use of any circuitry described, no circuit patent licenses are implied and National reserves the right at any time without notice to change said circuitry and specifications. 2-12 3.0 PROCESS INFORMATION 3.0 PROCESS INFORMATION 3.1 Process Flow Fabrication Site: South Portland Fairchild Process Technology: CS80CBI(Submicron Silicon Gate CMOS/Bipolar) Wafer Diameter: 6 inches Number of Masks: 17 Metallization: 0.5% Copper, dual layer Aluminum metal 1st layer = 7,500 A thick 2nd layer = 12,000 A thick Top Side Passivation: Polyamide (30,000 A thick) Over Nitride (11,500 A thick) Over Oxide (5,000 A thick) 3.2 Process Detail & Masks STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE 1: 2: 3: 4: 5: 6: 7: 8: 9: 10: 11: 12: 13: 14: 15: 16: 17: 18: 19: 20: 21: 22: 23: 24: 25: 26: 27: 28: 29: 30: 31: 32: 33: 34: 35: 36: Intial Ox Trench Define & Etch Mask 0.6, N-Iso N-Iso Implant N-Iso Drive N-Iso Ox Strip & Screen Ox Mask 0.8, N+ Buried layer N+ Buried Layer Implant Mask 0.9,P+ Buried Layer P+ Buried Layer Implant Buried Layer Anneal Epi Growth Pad Oxide & Nitride Mask 1.0, N-Well N-Well Implant Selective Oxide N-Well Nitride Strip P-Well implant Selective Oxide Etch N-Well & P-Well Drive-In Oxide Drive-In Oxide Strip Mask 2.0, Composite Composite Pad Oxide & Composite Nitride Composite Mask Etch Mask 3.0, P-Field P-Field Implant Iso Field Oxide Active (Composite Area) Nitride Strip Pad Oxide Removal & Sacrificial Oxide Growth & Vt Adjust Implant Sacrificial Oxide Strip & Gate Oxide & Poly Deposition Poly Dope, Poly Anneal Mask 4.0, Poly Poly Etch Poly Seal Oxide Mask 4.3, P-LDD P-LDD Implant LMC2001 Qualification Package 3-1 3.0 PROCESS INFORMATION STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE STAGE 37: 38: 39: 40: 41: 42: 43: 44: 45: 46: 47: 48: 49: 50: 51: 52: 53: 54: 55: 56: 57: 58: 59: 60: 61: 62: 63: 64: 65: 66: Mask 4.5, N-LDD N-LDD Implant Spacer Oxide Deposit & Etch Mask 5.0, N+ N+ Implnat Mask 5.5, Base Base Etch & Base Implant N+ Drive Mask 6.0, P+ P+ Implant Dielectric Layer1 & P+ Anneal SOG Mask 7.0, Window Window Etch & Contact Dielectric Mask 7.1, Contact Contact Etch Contact Plug & Etchback Metal 1 Deposition Mask 8.0, Metal 1 Metal 1 Etch Metal 1 Alloy Dielectric Layer2 Mask 9.0, Via Via Etch Via Deposition & Metal 2 Deposit Mask 10.0, Metal 2 Metal 2 Etch Passivation Oxide/Nitride?Polyamide Mask 13.0, Passivation Passivation Etch 3.3 Masking Sequence Layer title 0.8 0.9 1.0 2.0 3.0 3.5 4.0 4.3 4.5 5.0 5.5 6.0 7.0A 7.1 8.0 9.0 10.0 13.0 Mask N+ Buried Layer P+ Buried Layer N-Well Composite P-Field Cap Implant Poly P-LDD N-LDD N+ BASE P+ Window Contact Metal 1 Via Metal 2 Passiavation 3-2 4.0 PACKAGING INFORMATION 4.0 PACKAGING INFORMATION 4.1 Package Material Generic Package Type NS Package Number Package/Compound/ Manufacturer Package/Compound Mfg's Designation Lead Frame Material Manufacturer External Lead Frame Coating Pins Die Attached Method Bond Wire Bond Type Package Thermal 5 Lead SOT-23 MA05B Epoxy Cresol Novolac Sumitomo Sumitomo EME-6710 NSC B18 Copper NSC-DCI Solder Plate Sn/Pb Gull Wing, 6mils Thick Eutectic, Cr/Ag/Sn Gold, 1.0mils Hot Thermosonic Ball 265C/W 8 Lead SOIC MO8A Epoxy Cresol Novolac Sumitomo Sumitomo EME-1100R NSC B14 Copper NSC-DCI Solder Plate Sn/Pb Gull Wing, 9mils Thick Poly 6 Gold, 0.9mils Hot Thermosonic Ball 190C/W LMC2001 Qualification Package 4-1 4.0 PACKAGING INFORMATION 4.2 PACKAGE DIMENSIONS 4.2.1 Tape & Reel Tape Dimensions DS100128-97 8 mm Tape Size 0.130 (3.3) DIM A 0.124 (3.15) DIM Ao 0.130 (3.3) DIM B 0.126 (3.2) DIM Bo 0.138 0.002 (3.5 0.05) DIM F 0.055 0.004 (1.4 0.11) DIM Ko 0.157 (4) DIM P1 0.315 0.012 (8 0.3) DIM W SOT-23-5 Tape and Reel Specification Tape Format Tape Section Leader (Start End) Carrier Trailer (Hub End) # Cavities 0 (min) 75 (min) 3000 250 125 (min) 0 (min) Cavity Status Empty Empty Filled Filled Empty Empty Cover Tape Status Sealed Sealed Sealed Sealed Sealed Sealed 4-2 4.0 PACKAGING INFORMATION Reel Dimensions DS100128-98 8 mm Tape Size 7.00 330.00 A 0.059 0.512 0.795 2.165 1.50 B 13.00 20.20 55.00 C D N 0.331 + 0.059/-0.000 8.40 + 1.50/-0.00 W1 0.567 14.40 W2 W1+ 0.078/-0.039 W1 + 2.00/-1.00 W3 LMC2001 Qualification Package 4-3 4.0 PACKAGING INFORMATION 4.2.2 Package Dimensions Physical Dimensions inches (millimeters) unless otherwise noted SOT 23-5 Order Number LMC2001 NS Package Number MA05B 4-4 4.0 PACKAGING INFORMATION Physical Dimensions inches (millimeters) unless otherwise note 8-Pin Small Outline Order Number LMC2001 NS Package Number M08A LMC2001 Qualification Package 4-5 4.0 PACKAGING INFORMATION 4.3 Bonding Diagrams 4-6 4.0 PACKAGING INFORMATION LMC2001 Qualification Package 4-7 5.0 RELIABILITY DATA 5.0 RELIABILITY DATA Reliability Test Report File Number: FSC19980198 Originator: Nick Stanco Date: May 5, 1998 Purpose Approvals LMC2001 NEW DEVICE QUALIFICATION Reliability Engineer Mgr Ref Engineering Reference File Numbers RSC199800644 RSC199702347 RSC199702260 RSC199700160 Q19960526 Abstract Distribution List Solaiman Harooni Nick Stanco The LMC2001 is a new low power, low voltage precision op-amp device fabricated on the CS80CBI process in the 6 inch fab line in NSFM. This device was subjected to reliability testing in the 8L MDIP, 5L SOT-23 and 8L SOIC packages for qualification as a new device for the Amplifiers product line. The device has successfully completed all required reliability tests except for the final DOPL lot required for qualification of the final silicon revision which is now in progress. This preliminary report will be updated to included the final DOPL test results once available and to release this device if warranted. Description Test Request RSC199700160 RSC199702260 RSC199702347 RSC199800644 Device Name LMC2001AIN LMC2001ST(005) LMC2001M(008) LMC2001M(008) Sbgp A A A B Wafer Die Run W#10 B0081794 B00800MC4C Fab Loc FM FM FM FM Fab Line CS80CBI 6 INCH 6 INCH 6 INCH Pkg Code N\MDIP N\TG23 N\MSON N\MSON # Leads 8 5 8 8 Assy Loc SC EM EM EM Mold Cmpd B8 B14 B14 Tests Performed Test: Autoclave Test (ACLV) Test Request Device RSC199702260 LMC2001ST(005) RSC199702347 LMC2001M(008) Test: Operating Life Test (Dynamic) (DOPL) Test Request Device RSC199702347 LMC2001M(008) RSC199800644 LMC2001M(008) Test: Operating Life Test (Static) (SOPL) Test Request Device RSC199700160 LMC2001AIN Sbgrp A A Rel Humidity 100% 100% Pressure 15 PSIG 15 PSIG High Temp 121C 121C LowTemp Sbgrp A B Rel Humidity Pressure High Temp 150C 150C LowTemp Sbgrp A Rel Humidity Pressure High Temp 150C LowTemp LMC2001 Qualification Package 5-1 5.0 RELIABILITY DATA Tests Performed (cont) Test: Temperature Cycle (TMCL) Test Request RSC199702260 RSC199702347 Device LMC2001ST(005) LMC2001M(008) Sbgrp A A Rel Humidity Pressure High Temp 150C 150C LowTemp -65C -65C Test: Temperature Humidity Bias Test (THBT) Test Request RSC199702260 RSC199702347 Device LMC2001ST(005) LMC2001M(008) Sbgrp A A Rel Humidity 85% 85% Pressure High Temp 85C 85C LowTemp Preconditioning: All DOPL, THBT, TMCL and ACLV parts were preconditioned per RAI-5-039 using the "IB1" flow with a 168 hour 85C, 85% RH moisture soak and 3 passes of IR reflow at 235C. Results/Discussion Package 8L SOIC Test DOPL-IB1 Timepoint 168 HOURS 500 HOURS 1000 HOURS 168 HOURS 500 HOURS 1000 HOURS 96 HOURS 168 HOURS 500 CYCLES 1000 CYCLES 168 HOURS 500 HOURS 1000 HOURS 96 HOURS 168 HOURS 500 CYCLES 1000 CYCLES 168 HOURS 500 HOURS 1000 HOURS Lot 1 REJ/SS 0/77 0/77 0/77 0/76 0/76 0/76 0/77 0/77 0/77 0/77 0/76 0/76 0/76 0/77 0/77 0/77 0/77 0/77 0/77 0/77 Lot 2 REJ/SS 0/76 0/76 0/77 THBT-IB1 ACLV-IB1 TMCL-IB1 5L SOT-23 THBT-IB1 ACLV-IB1 TMCL-IB1 8L MDIP SOPL LATCH-UP: PASSED +/- 200 MA AT BOTH 25C AND 85C PER JEDEC 17 STANDARDS ESD Testing Human Body Model 500V 1000V 1500V 2000V 2500V 3000V 3500V REJ/SS 0/5 0/5 0/5 0/5 0/5 5/5 5/5 Machine Model 100V 125V 150V 175V 200V 250V REJ/SS 0/5 0/5 0/5 2/5 5/5 5/5 5-2 5.0 RELIABILITY DATA Conclusion This is a preliminary report covering all reliability testing to date on the LMC2001. The device has not yet been approved for release by Corporate Reliability. Operational Life Hour Conversion to Years Enter Accl. Temperature (C) Enter Operating Temperature (C) Enter Activation Energy (ev) The estimated Acc. Factor is Test Time Points of OPL( hrs) 24 48 72 96 120 168 500 1000 150 55 0.7 258.2380605 Est. Life time of the device (yrs) 0.709445221 1.418890442 2.128335663 2.837780884 3.547226105 4.966116547 14.78010877 29.56021754 LMC2001 Op Amp 90 80 Vos Drift (nV) 70 60 50 40 30 20 10 0 0 5 10 15 20 SOT23-5 3 mm 3 mm Years LMC2001 Qualification Package 5-3 5.0 RELIABILITY DATA 5.2 ESD/LATCH-UP Human Body Model (HBM) * R = 1500 ohms and C = 100pF * rise time = 10ns Machine Model (MM) * R = 0 ohms and C = 200pF * rise time = <8ns 5-4 6.0 CHARACTERIZATION DATA 6.0 CHARACTERIZATION DATA 6.1 Test Summary Test# 1 3 4 210 216 229 230 237 240 243 246 247 248 250 249 251 252 Test Name PSI Autozero Delay VOS CMRR 5.25V CMRR 4.75V VOS @ PSRR(5.25V) VOS @ PSRR(4.75V) Gain RL 2k source Gain RL 2k sink Gain RL 10k source Gain RL 10k sink Swing RL 2k source Swing RL 2k sink Swing RL 10k source Swing RL 10k sink Iout source Iout sink Temp (C) 25 25 25 25 25 25 25 25 25 25 25 25 25 25 25 25 25 Supply Voltage 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V 2.50V Obs. 440 440 440 440 440 440 440 440 440 440 440 440 440 440 440 440 440 Avg. 0.720 6.400 4.875 120.878 119.604 6.029 6.073 132.547 130.966 133.282 132.642 2.436 -2.424 2.471 -2.470 6.096 20.260 Min. 0.556 6.000 -21.30 105.328 108.273 -21.594 -20.288 117.719 116.873 119.825 118.052 2.415 -2.435 2.463 -2.478 5.16 8.565 Max. 0.873 20.000 27.794 148.328 139.333 30.7 32.219 167.795 149.379 158.253 158.253 2.440 -2.405 2.473 -2.463 7.005 31.41 Units mA mS V db db V V db db db db V V V V mA mA LMC2001 Qualification Package 6-1 6.0 CHARACTERIZATION DATA 6.2 Test Graphs 6-2 6.0 CHARACTERIZATION DATA LMC2001 Qualification Package 6-3 6.0 CHARACTERIZATION DATA 6-4 6.0 CHARACTERIZATION DATA LMC2001 Qualification Package 6-5 6.0 CHARACTERIZATION DATA 6-6 6.0 CHARACTERIZATION DATA LMC2001 Qualification Package 6-7 6.0 CHARACTERIZATION DATA 6-8 6.0 CHARACTERIZATION DATA LMC2001 Qualification Package 6-9 6.0 CHARACTERIZATION DATA 6-10 6.0 CHARACTERIZATION DATA LMC2001 Qualification Package 6-11 6.0 CHARACTERIZATION DATA 6-12 National Semiconductor supplies a comprehensive set of service and support capabilities. Complete product information and design support is available from National's customer support centers. To receive sales literature and technical assistance, contact the National support center in your area. Americas Tel: 1-800-272-9959 Fax: 1-800-737-7018 Email: support@nsc.com Europe Fax: +49 (0) 1 80 5 30 85 86 Email: europe.support@nsc.com Deutsch Tel: +49 (0) 1 80 5 30 85 85 English Tel: +49 (0) 1 80 5 32 78 32 Japan Tel: 81-3-5639-7560 Fax: 81-3-5639-7507 Asia Pacific Fax: 65-2504466 Email: sea.support@nsc.com Tel: 65-2544466 (IDD telephone charge to be paid by caller) See us on the Worldwide Web @ http://www.national.com NATIONAL SEMICONDUCTOR(R), (R), are trademarks of National Semiconductor Corporation. (c)1998 National Semiconductor Corporation. All rights reserved. |
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