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| MOTOROLA SEMICONDUCTOR TECHNICAL DATA Order this document by MPX5700/D Integrated Silicon Pressure Sensor On-Chip Signal Conditioned, Temperature Compensated and Calibrated The MPX5700 series piezoresistive transducer is a state-of-the-art monolithic silicon pressure sensor designed for a wide range of applications, but particularly those employing a microcontroller or microprocessor with A/D inputs. This patented, single element transducer combines advanced micromachining techniques, thin-film metallization, and bipolar processing to provide an accurate, high level analog output signal that is proportional to the applied pressure. Features * 2.5% Maximum Error over 0 to 85C * Ideally Suited for Microprocessor or Microcontroller-Based Systems * Available in Absolute, Differential and Gauge Configurations * Patented Silicon Shear Stress Strain Gauge * Durable Epoxy Unibody Element MPX5700 SERIES INTEGRATED PRESSURE SENSOR 0 to 700 kPa (0 to 101.5 psi) 15 to 700 kPa (2.18 to 101.5 psi) 0.2 to 4.7 V OUTPUT VS MPX5700D CASE 867 SENSING ELEMENT THIN FILM TEMPERATURE COMPENSATION AND GAIN STAGE #1 GAIN STAGE #2 AND GROUND REFERENCE SHIFT CIRCUITRY Vout PINS 4, 5 AND 6 ARE NO CONNECTS GND MPX5700DP CASE 867C Figure 1. Fully Integrated Pressure Sensor Schematic MPX5700AS CASE 867E PIN NUMBER 1 2 3 Vout Gnd VS 4 5 6 N/C N/C N/C NOTE: Pins 4, 5, and 6 are internal device connections. Do not connect to external circuitry or ground. Pin 1 is noted by the notch in the lead. REV 5 Motorola Sensor (c) Motorola, Inc. 2001 Device Data 1 MPX5700 SERIES MAXIMUM RATINGS(1) Parametrics Maximum Pressure(2) (P2 v 1 Atmosphere) Storage Temperature Operating Temperature Symbol P1max Tstg TA Value 2800 -40 to +125 -40 to +125 Unit kPa C C NOTES: 1. Maximum Ratings apply to Case 867 only. Extended exposure at the specified limits may cause permanent damage or degradation to the device. 2. This sensor is designed for applications where P1 is always greater than, or equal to P2. P2 maximum is 500 kPa. OPERATING CHARACTERISTICS (VS = 5.0 Vdc, TA = 25C unless otherwise noted, P1 > P2. Decoupling circuit shown in Figure 4 required to meet electrical specifications.) Characteristic Pressure Range(1) Supply Voltage(2) Supply Current Zero Pressure Offset(3) Full Scale Output(4) Full Scale Span(5) Gauge, Differential: Absolute (0 to 85C) (0 to 85C) Gauge, Differential: MPX5700D Absolute: MPX5700A Symbol POP VS Io Voff VFSO VFSS -- V/P tR IO+ -- Min 0 15 4.75 - 0.088 0.184 4.587 -- -- -- -- -- -- Typ -- 5.0 7.0 0.2 4.7 4.5 -- 6.4 1.0 0.1 20 Max 700 700 5.25 10 0.313 0.409 4.813 -- 2.5 -- -- -- -- Unit kPa Vdc mAdc Vdc Vdc Vdc %VFSS mV/kPa ms mAdc ms (0 to 85C) (0 to 85C) (0 to 85C) Accuracy(6) Sensitivity Response Time(7) Output Source Current at Full Scale Output Warm-Up Time(8) NOTES: 1. 1.0 kPa (kiloPascal) equals 0.145 psi. 2. Device is ratiometric within this specified excitation range. 3. Offset (Voff) is defined as the output voltage at the minimum rated pressure. 4. Full Scale Output (VFSO) is defined as the output voltage at the maximum or full rated pressure. 5. Full Scale Span (VFSS) is defined as the algebraic difference between the output voltage at full rated pressure and the output voltage at the minimum rated pressure. 6. Accuracy (error budget) consists of the following: * Linearity: Output deviation from a straight line relationship with pressure over the specified pressure range. * Temperature Hysteresis: Output deviation at any temperature within the operating temperature range, after the temperature is cycled to and from the minimum or maximum operating temperature points, with zero differential pressure applied. * Pressure Hysteresis: Output deviation at any pressure within the specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25C. * TcSpan: Output deviation over the temperature range of 0 to 85C, relative to 25C. * TcOffset: Output deviation with minimum rated pressure applied, over the temperature range of 0 to 85C, relative to 25C. * Variation from Nominal: The variation from nominal values, for Offset or Full Scale Span, as a percent of VFSS, at 25C. 7. Response Time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when subjected to a specified step change in pressure. 8. Warm-up Time is defined as the time required for the device to meet the specified output voltage after the pressure has been stabilized. MECHANICAL CHARACTERISTICS Characteristics Weight, Basic Element (Case 867) Typ 4.0 Unit grams 2 Motorola Sensor Device Data MPX5700 SERIES ON-CHIP TEMPERATURE COMPENSATION, CALIBRATION AND SIGNAL CONDITIONING Figure 3 illustrates the Differential/Gauge basic chip carrier (Case 867). A fluorosilicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the sensor diaphragm. (For use of the MPX5700D in a high pressure, cyclic application, consult the factory.) The MPX5700 series pressure sensor operating characteristics, and internal reliability and qualification tests are based on use of dry air as the pressure media. Media, other than dry air, may have adverse effects on sensor performance and long-term reliability. Contact the factory for information regarding media compatibility in your application. Figure 2 shows the sensor output signal relative to pressure input. Typical, minimum, and maximum output curves are shown for operation over a temperature range of 0 to 85C using the decoupling circuit shown in Figure 4. The output will saturate outside of the specified pressure range. Figure 4 shows the recommended decoupling circuit for interfacing the output of the integrated sensor to the A/D input of a microprocessor or microcontroller. Proper decoupling of the power supply is recommended. 5.0 4.5 OUTPUT (V) TRANSFER FUNCTION: Vout = VS*(0.0012858*P+0.04) ERROR 4.0 VS = 5.0 Vdc TEMP = 0 to 85C 3.5 3.0 2.5 2.0 1.5 1.0 0.5 0 0 100 300 500 200 400 600 DIFFERENTIAL PRESSURE (kPa) 700 800 MAX MIN TYPICAL Figure 2. Output versus Pressure Differential FLUORO SILICONE DIE COAT DIE P1 WIRE BOND STAINLESS STEEL METAL COVER +5 V Vout Vs IPS 1.0 mF 0.01 mF GND 470 pF OUTPUT LEAD FRAME Motorola Sensor Device Data EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE EEEEEEEEEEE P2 EPOXY CASE RTV DIE BOND Figure 3. Cross-Sectional Diagram (Not to Scale) Figure 4. Recommended power supply decoupling and output filtering. For additional output filtering, please refer to Application Note AN1646. 3 MPX5700 SERIES PRESSURE (P1)/VACUUM (P2) SIDE IDENTIFICATION TABLE Motorola designates the two sides of the pressure sensor as the Pressure (P1) side and the Vacuum (P2) side. The Pressure (P1) side is the side containing fluoro silicone gel which protects the die from harsh media. The Motorola MPX pressure sensor is designed to operate with positive differential pressure applied, P1 > P2. The Pressure (P1) side may be identified by using the table below: Pressure (P1) Side Identifier Stainless Steel Cap Side with Part Marking Side with Port Attached Side with Port Attached Part Number MPX5700D, MPX5700A MPX5700DP MPX5700GP, MPX5700AP MPX5700GS, MPX5700AS Case Type 867C 867C 867B 867E ORDERING INFORMATION MPX Series Device Type Basic Element Differential Absolute Ported Elements Differential Dual Ports Gauge Gauge, Axial Absolute Absolute, Axial Options Case Type 867C 867C 867C 867B 867E 867B 867E Order Number MPX5700D MPX5700A MPX5700DP MPX5700GP MPX5700GS MPX5700AP MPX5700AS Device Marking MPX5700D MPX5700A MPX5700DP MPX5700GP MPX5700D MPX5700AP MPX5700A 4 Motorola Sensor Device Data MPX5700 SERIES PACKAGE DIMENSIONS C R M B -A- N PIN 1 SEATING PLANE 1 2 3 4 5 6 POSITIVE PRESSURE (P1) NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. 3. DIMENSION -A- IS INCLUSIVE OF THE MOLD STOP RING. MOLD STOP RING NOT TO EXCEED 16.00 (0.630). DIM A B C D F G J L M N R S OPEN GROUND +VOUT +VSUPPLY -VOUT OPEN INCHES MIN MAX 0.595 0.630 0.514 0.534 0.200 0.220 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 30 _NOM 0.475 0.495 0.430 0.450 0.090 0.105 MILLIMETERS MIN MAX 15.11 16.00 13.06 13.56 5.08 5.59 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.40 17.65 18.42 30 _NOM 12.07 12.57 10.92 11.43 2.29 2.66 L -T- G F D 6 PL 0.136 (0.005) M J S TA M STYLE 1: PIN 1. 2. 3. 4. 5. 6. VOUT GROUND VCC V1 V2 VEX STYLE 2: PIN 1. 2. 3. 4. 5. 6. OPEN GROUND -VOUT VSUPPLY +VOUT OPEN STYLE 3: PIN 1. 2. 3. 4. 5. 6. CASE 867-08 ISSUE N BASIC ELEMENT T R SEATING PLANE A U L V NOTES: 1. DIMENSIONS ARE IN MILLIMETERS. 2. DIMENSIONS AND TOLERANCES PER ASME Y14.5M, 1994. MILLIMETERS MIN MAX 29.08 29.85 17.4 18.16 7.75 8.26 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 5.84 6.35 5.59 6.1 23.11 BSC 4.62 4.93 VOUT GROUND VCC V1 V2 VEX N Q B 1 2 3 4 5 6 Q K S P C J 0.25 M PIN 1 P TQ M G F 6X D 0.173 DIM A B C D F G J K L N P Q R S U V M TP S Q S CASE 867B-04 ISSUE F PRESSURE SIDE PORTED (AP, GP) STYLE 1: PIN 1. 2. 3. 4. 5. 6. Motorola Sensor Device Data 5 MPX5700 SERIES PACKAGE DIMENSIONS-CONTINUED NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D F G J K L N P Q R S U V W X INCHES MIN MAX 1.145 1.175 0.685 0.715 0.405 0.435 0.027 0.033 0.048 0.064 0.100 BSC 0.014 0.016 0.695 0.725 0.290 0.300 0.420 0.440 0.153 0.159 0.153 0.159 0.063 0.083 0.220 0.240 0.910 BSC 0.182 0.194 0.310 0.330 0.248 0.278 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 29.08 29.85 17.40 18.16 10.29 11.05 0.68 0.84 1.22 1.63 2.54 BSC 0.36 0.41 17.65 18.42 7.37 7.62 10.67 11.18 3.89 4.04 3.89 4.04 1.60 2.11 5.59 6.10 23.11 BSC 4.62 4.93 7.87 8.38 6.30 7.06 P 0.25 (0.010) X R PORT #1 POSITIVE PRESSURE (P1) PORT #2 VACUUM (P2) M TQ M -A- U W L V PORT #2 VACUUM (P2) N PORT #1 POSITIVE PRESSURE (P1) -Q- B PIN 1 1 2 3 4 5 6 K S C SEATING PLANE -T- -T- J SEATING PLANE G F D 6 PL 0.13 (0.005) M A M CASE 867C-05 ISSUE F PRESSURE AND VACUUM SIDES PORTED (DP) VOUT GROUND VCC V1 V2 VEX C A NOTES: 1. DIMENSIONING AND TOLERANCING PER ANSI Y14.5M, 1982. 2. CONTROLLING DIMENSION: INCH. DIM A B C D E F G J K N S V INCHES MIN MAX 0.720 0.690 0.245 0.255 0.780 0.820 0.027 0.033 0.178 0.186 0.048 0.064 0.100 BSC 0.014 0.016 0.345 0.375 0.300 0.310 0.220 0.240 0.182 0.194 STYLE 1: PIN 1. 2. 3. 4. 5. 6. MILLIMETERS MIN MAX 17.53 18.28 6.22 6.48 19.81 20.82 0.69 0.84 4.52 4.72 1.22 1.63 2.54 BSC 0.36 0.41 8.76 9.53 7.62 7.87 5.59 6.10 4.62 4.93 -B- V PIN 1 PORT #1 POSITIVE PRESSURE (P1) 6 5 4 3 2 1 K S G F D 6 PL M J N E -T- 0.13 (0.005) TB M VOUT GROUND VCC V1 V2 VEX CASE 867E-03 ISSUE D PRESSURE SIDE PORTED (AS, GS) 6 Motorola Sensor Device Data MPX5700 SERIES Motorola reserves the right to make changes without further notice to any products herein. Motorola makes no warranty, representation or guarantee regarding the suitability of its products for any particular purpose, nor does Motorola assume any liability arising out of the application or use of any product or circuit, and specifically disclaims any and all liability, including without limitation consequential or incidental damages. "Typical" parameters which may be provided in Motorola data sheets and/or specifications can and do vary in different applications and actual performance may vary over time. All operating parameters, including "Typicals" must be validated for each customer application by customer's technical experts. Motorola does not convey any license under its patent rights nor the rights of others. Motorola products are not designed, intended, or authorized for use as components in systems intended for surgical implant into the body, or other applications intended to support or sustain life, or for any other application in which the failure of the Motorola product could create a situation where personal injury or death may occur. Should Buyer purchase or use Motorola products for any such unintended or unauthorized application, Buyer shall indemnify and hold Motorola and its officers, employees, subsidiaries, affiliates, and distributors harmless against all claims, costs, damages, and expenses, and reasonable attorney fees arising out of, directly or indirectly, any claim of personal injury or death associated with such unintended or unauthorized use, even if such claim alleges that Motorola was negligent regarding the design or manufacture of the part. Motorola and are registered trademarks of Motorola, Inc. Motorola, Inc. is an Equal Opportunity/Affirmative Action Employer. How to reach us: USA/EUROPE/Locations Not Listed: Motorola Literature Distribution; P.O. Box 5405, Denver, Colorado 80217. 1-303-675-2140 or 1-800-441-2447 Technical Information Center: 1-800-521-6274 JAPAN: Motorola Japan Ltd.; SPS, Technical Information Center, 3-20-1, Minami-Azabu. Minato-ku, Tokyo 106-8573 Japan. 81-3-3440-3569 ASIA/PACIFIC: Motorola Semiconductors H.K. Ltd.; Silicon Harbour Centre, 2, Dai King Street, Tai Po Industrial Estate, Tai Po, N.T., Hong Kong. 852-26668334 HOME PAGE: http://www.motorola.com/semiconductors/ Motorola Sensor Device Data 7 MPX5700/D |
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